AVS 53rd International Symposium
    Nanometer-scale Science and Technology Thursday Sessions
       Session NS-ThA

Paper NS-ThA9
Multiphysics Modeling of Electrochemical Structuring Using Complex Tool Electrodes

Thursday, November 16, 2006, 4:40 pm, Room 2016

Session: Nanoscale Material Processing
Presenter: G.S. Hwang, University of Texas at Austin
Authors: J.A. Kenney, University of Texas at Austin
G.S. Hwang, University of Texas at Austin
Correspondent: Click to Email
Electrochemical machining using ultra-short voltage pulses has been used to modify electrically-active substrates at the micron length-scale without causing thermal damage or affecting crystal structure, unlike other machining technologies. However, this technique suffers from relatively slow processing speeds. In order to increase the speed, the use of complex tool 'template' electrodes has been suggested. Here we examine the relationship between pulse duration and feature separation on the resulting substrates using a transient charging simulation of the behavior of the pulse coupled with a feature profile evolution simulation employing the level set method.