| AVS 53rd International Symposium | |
| MEMS and NEMS | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| MN-TuP1 Development of Accelerometer Using Multilayered Optical Bandpass Filter H. Toyota, M. Yaegashi, T. Ono, Hirosaki University, Japan, M. Shimada, Y. Jin, NTT MI Labs, Japan |
| MN-TuP2 Mechanical Quality Factor Measurement of Micro Structure According to Vacuum Range and Temperature Variation J.S. Kim, Korea University, W.B. Kim, K.D. Jung, M.S. Choi, K.W. Nam, I.S. Song, Samsung Advanced Institute of Technology, Korea, B.K. Ju, Korea University |
| MN-TuP3 Detection of Stimulated Proteins in KDR/VEGF-A165 System by Microcantilever Sensor F.S. Fiorilli, R.C. Ricciardi, P.R. Rivolo, M.S. Marasso, B.S. Bianco, Politecnico di Torino, Italy, N.L. Napione, B.F. Bussolino, Universit@aa a@ degli Studi di Torino, Italy |
| MN-TuP4 Plasma Polymerised Biomaterial for Micro-Nano Device Bonding at Room Temperature M. Dhayal, Rajasthan University, India |
| MN-TuP5 Bulk Micromachining of High Index Silicon Wafers and Possible Applications in Diffractive Elements W. Calleja-Arriaga, F.J. De la Hidalga-Wade, C. Reyes-Betanzo, A. Torres-Jacome, C. Zuñiga-Islas, M. Linares-Aranda, P. Rosales-Quintero, INAOE, Mexico |
| MN-TuP6 In Situ Characterization of Passivation Layer for Silicon Cryogenic Etching X. Mellhaoui, C. Duluard, L. Pichon, R. Dussart, P. Ranson, T. Tillocher, P. Lefaucheux, GREMI/CNRS - Université d'Orléans, France |
| MN-TuP8 Controlling the Silicon Micro-grass in Fabrication of Deeply Etched Silicon Structures using Adaptive Bosch Process M.W. Lee, B.S. Kim, J.H. Sung, S.B. Jo, C.H. Choi, E.H. Lee, S.-G. Park, S.G. Lee, B.H. O, INHA University, South Korea |
| MN-TuP9 The Adhesion Analysis of Multi Layered Hierarchical Structure of Gecko Feet T.W. Kim, B. Bhushan, The Ohio State University |