| AVS 53rd International Symposium | |
| MEMS and NEMS | Tuesday Sessions |
| Session MN-TuP |
| Session: | Aspects of MEMS and NEMS Poster Session |
| Presenter: | T.W. Kim, The Ohio State University |
| Authors: | T.W. Kim, The Ohio State University B. Bhushan, The Ohio State University |
| Correspondent: | Click to Email |