AVS 53rd International Symposium | |
MEMS and NEMS | Monday Sessions |
Session MN+BI-MoA |
Session: | Surface and Interface Science of MEMS and NEMS |
Presenter: | M. Cichomski, The Ohio State University |
Authors: | M. Cichomski, The Ohio State University B. Bhushan, The Ohio State University |
Correspondent: | Click to Email |