AVS 53rd International Symposium
    MEMS and NEMS Monday Sessions
       Session MN+BI-MoA

Invited Paper MN+BI-MoA1
A New Technique for Studying Nanoscale Friction at Sliding Velocities up to 400 mm/s Using Atomic Force Microscope

Monday, November 13, 2006, 2:00 pm, Room 2007

Session: Surface and Interface Science of MEMS and NEMS
Presenter: Z. Tao, The Ohio State University
Authors: B. Bhushan, The Ohio State University
Z. Tao, The Ohio State University
Correspondent: Click to Email
Micro/nanoelectromechanical devices (MEMS/NEMS) and components operate at high sliding velocities. Studies of tribological properties of materials by AFM are limited in low velocity regime (<250 µm/s) due to inherent instrument limitation of AFM. To overcome the limitation of AFM working velocity, a high velocity stage technique has been developed for tribological investigation up to 400 mm/s. A custom calibrated stage is used for mounting sample. The stage is driven by a piezomotor motor which is controlled using proportional-integral-derivative (PID) algorithm. Friction data are obtained by processing the AFM laser photo-diode signals using a high sampling rate data acquisition system. The friction data obtained from the modified setup at high sliding velocities is compared with the results from conventional AFM friction measurement. The effects of scan size, rest time, acceleration, and velocity on the friction force and adhesive force for single crystal silicon (100) with native oxide has been studied.