AVS 53rd International Symposium | |
Plasma Science and Technology | Monday Sessions |
Session PS1-MoM |
Session: | Etch for Advanced Interconnect I |
Presenter: | G.A. Curley, Ecole Polytechnique, France |
Authors: | G.A. Curley, Ecole Polytechnique, France J.P. Booth, Lam Research Corporation D. Mari@aa c@, Ecole Polytechnique, France C.S. Corr, Australian National University J. Guillon, Ecole Polytechnique, France |
Correspondent: | Click to Email |