| AVS 52nd International Symposium | |
| MEMS and NEMS | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| MN-MoP1 AFM Studies of Conditioner Thickness Distribution and Binding Interactions on Hair Surface B. Bhushan, N. Chen, The Ohio State University |
| MN-MoP2 Plasma Enhanced Chemical Vapor Deposition of Low Stress Silicon Nitride Using Diethylsilane as Precursor L.M. Fischer, S. McColman, B. Szeto, K. Westra, S. Evoy, University of Alberta, Canada |
| MN-MoP3 DNA Detection System using a Microcantilever K.-A. Yoo, Myongji University, Korea, K.-H. Na, Lite-on Technology Corp. Korea, S.-R. Joung, C.J. Kang, Y.S. Kim, Myongji University, Korea |
| MN-MoP5 Novel Fabrication Method of a Master Structure for Replicating an Optical Device Including Vertically Curved Structures M.W. Lee, K.J. Lim, C.H. Choi, S.B. Jo, S.G. Lee, S.G. Park, B.H. O, Inha University, Korea |
| MN-MoP6 CO Gas Sensor based on a Doped ZnO Film with a Microhotplate/Floating-Gate MIS Structure W. Calleja-Arriaga, J. De la Hidalga-Wade, Inaoe Mexico, A. Heredia-Jimenez, Upaep Puebla-Mexico, G. Rosas-Guevara, I. Juarez-Ramirez, C. Zuñiga-Islas, N. Carlos-Ramirez, P. Alarcon-Peña, L. Tecuapetla-Quechol, M. Escobar-Aguilar, J. Silva, Inaoe Mexico, J.L. Gonzalez-Vidal, Citis-Uaeh Mexico, M.A. Reyes-Barranca, M.L. Olvera, A. Maldonado, Cinvestav Mexico |