AVS 52nd International Symposium
    MEMS and NEMS Monday Sessions
       Session MN-MoP

Paper MN-MoP5
Novel Fabrication Method of a Master Structure for Replicating an Optical Device Including Vertically Curved Structures

Monday, October 31, 2005, 5:00 pm, Room Exhibit Hall C&D

Session: General Aspects of MEMS and NEMS Poster Session
Presenter: M.W. Lee, Inha University, Korea
Authors: M.W. Lee, Inha University, Korea
K.J. Lim, Inha University, Korea
C.H. Choi, Inha University, Korea
S.B. Jo, Inha University, Korea
S.G. Lee, Inha University, Korea
S.G. Park, Inha University, Korea
B.H. O, Inha University, Korea
Correspondent: Click to Email
Replication process is a good way to fabricate a passive optical device. Silicon based fabrication technology provides an efficient way to fabricate a master structure with optically smooth surface roughness. As silicon based technologies are often 2 dimensional processes, replication process requires a sophisticate fabrication steps for a master structure. For that reason, a vertically curved structure which is essential for a passive optical device is hard to fabricate. Some special processes, such as x-ray lithography, laser ablation, and gray-scale mask can overcome the conventional 2-dimensional fabrication process. But the processes need additional process steps, machines and masks. This study demonstrates easy way for fabricating a silicon master structure with vertically curved mirrors. This fabrication method is roughly divided into two steps. At the first step, a silicon wafer was deeply etched by using ICP system, to form the waveguide structures in the master structure. The vertically curved mirror structures at the each ends of the waveguides, are formed by using photoresist reflow process of the second step. After the master fabrication, the master shape was transferred to a PDMS mold. Replication process was carried by using UV curable polymers, and successful vertical redirection of lights at the curved structure was observed with a CCD device. The surface roughness of the replicated structure was also measured, and an optically smooth surface roughness was observed. Detailed fabrication steps and the fabricated device characteristics will be discussed.