| AVS 52nd International Symposium | |
| MEMS and NEMS | Monday Sessions |
| Session MN-MoP |
| Session: | General Aspects of MEMS and NEMS Poster Session |
| Presenter: | B. Bhushan, The Ohio State University |
| Authors: | B. Bhushan, The Ohio State University N. Chen, The Ohio State University |
| Correspondent: | Click to Email |