AVS 52nd International Symposium | |
Plasma Science and Technology | Wednesday Sessions |
Session PS+TF-WeM |
Session: | Plasma Enhanced CVD and ALD |
Presenter: | C. Fong, CSIRO, Australia |
Authors: | B.W. Muir, CSIRO, Australia C. Fong, CSIRO, Australia J. Oldham, CSIRO, Australia P.G. Hartley, CSIRO, Australia K. Mc Lean, CSIRO, Australia A. Nelson, Australian Nuclear Science and Technology Organisation M. James, Australian Nuclear Science and Technology Organisation |
Correspondent: | Click to Email |