AVS 51st International Symposium
    Plasma Science and Technology Wednesday Sessions
       Session PS-WeA

Paper PS-WeA10
2D-Imaging Measurements of Sputtered Atom Velocities in dc Magnetron Discharges by Doppler-Shifted LIF

Wednesday, November 17, 2004, 5:00 pm, Room 213A

Session: Plasma Diagnostics
Presenter: K. Sasaki, Nagoya University, Japan
Authors: K. Sasaki, Nagoya University, Japan
K. Shibagaki, Suzuka National College of Technology, Japan
N. Nafarizal, Nagoya University, Japan
H. Toyoda, Nagoya University, Japan
T. Kato, Nagoya University, Japan
S. Iwata, Nagoya University, Japan
S. Tsunashima, Nagoya University, Japan
H. Sugai, Nagoya University, Japan
Correspondent: Click to Email
In the deposition of multilayer magnetic thin films such as Co/Pt and Fe/Pt using magnetron sputtering discharges, a key issue is how to obtain very flat interfaces between the multilayers. Bombardment of energetic ions and neutrals during deposition may roughen the interface. Understanding on energies of particles supplied to the substrate is helpful to optimize the apparatus for the deposition of multilayer magnetic films. In the present work, we measured the spatial distribution of velocity distribution of Fe atoms in a conventional dc magnetron discharges. We employed laser-induced fluorescence imaging spectroscopy. By recording pictures of laser-induced fluorescence at various wavelengths of a tunable optical parametric oscillator, we obtained many Doppler spectra that represent the velocity distributions of Fe atoms in a r-z plane of the cylindrically symmetric magnetron discharge. In a low-pressure discharge at 3 mTorr, Fe atoms near the target had broad velocity distribution, and they contained energetic component with velocity faster than 10 km/s (29 eV). At a distance of 60 mm from the target, Fe atoms had a thermalized distribution having two temperatures. By integrating the velocity distribution, we obtained two-dimensional maps of the mean velocity of Fe atoms. In a low gas pressure of 3 mTorr, Fe atoms had a mean velocity of 3.6 km/s in the region adjacent to the target surface. In a gas pressure of 20 mTorr, the mean velocity of Fe adjacent to the target was slower than 1 km/s. This work was supported by the 21st Century COE Program by the Ministry of Education, Culture, Sports, Science and Technology of Japan.