AVS 50th International Symposium
    Processing at the Nanoscale Tuesday Sessions

Session NS+MI-TuA
Nanoscale Patterning and Lithography

Tuesday, November 4, 2003, 2:00 pm, Room 308
Moderator: B.D. Terris, IBM Almaden Research Center


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

2:00pm NS+MI-TuA1 Invited Paper
Patterning Magnetic Recording Media by Imprinting
G.M. McClelland, M.W. Hart, IBM Almaden Research Center, M.E. Best, Hitachi San Jose Research Center, C.T. Rettner, K.R. Carter, IBM Almaden Research Center, G. Hu, B.D. Terris, M. Albrecht, Hitachi San Jose Research Center
2:40pm NS+MI-TuA3
Buffer Layer Assisted Laser Patterning of Metals at the Nanometer Scale
G. Kerner, M. Asscher, The Hebrew University of Jerusalem, Israel
3:00pm NS+MI-TuA4
Low-Temperature Nanolithography using Energetic Neutral Atoms
E.A. Akhadov, A.H. Mueller, M.A. Hoffbauer, Los Alamos National Laboratory
3:20pm NS+MI-TuA5 Invited Paper
Self-Assembling Circuits?
K.W. Guarini, C.T. Black, IBM
4:00pm NS+MI-TuA7
Fabrication and Electrical Characterization of 2D Dopant Nanostructures in Si
J.S. Kline, J.C. Kim, S.J. Robinson, K.-F. Chen, R. Chan, M. Feng, J.R. Tucker, University of Illinois at Urbana-Champaign, J.-Y. Ji, T.-C. Shen, Utah State University, C. Yang, R.-R. Du, University of Utah
4:20pm NS+MI-TuA8
Polymer Patterning using a Soft Inkpad
Y.P. Kong, Institute of Materials Research and Engineering, Singapore, L. Tan, L.-R. Bao, University of Michigan, Ann Arbor, X.D. Huang, Institute of Materials Research and Engineering, Singapore, S.W. Pang, University of Michigan, Ann Arbor, A.F. Yee, Institute of Materials Research and Engineering, Singapore
4:40pm NS+MI-TuA9
Influence of Stoichiometry and Structure on the Local Oxidation of Metal Films
N. Farkas, G. Zhang, K.M. Donnelly, E.A. Evans, R.D. Ramsier, The University of Akron, J.A. Dagata, National Institute of Standards and Technology