| AVS 50th International Symposium | |
| Microelectromechanical Systems (MEMS) | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | MM-TuA1 Development of a Deep Phase Fresnel Lens in Silicon B. Morgan, C.M. Waits, University of Maryland, College Park, J. Krizmanic, NASA - Goddard Spaceflight Center, R. Ghodssi, University of Maryland, College Park |
| 2:20pm | MM-TuA2 Fabrication and Characterization of a Capacitive Micromachined Shunt Switch S.L. Firebaugh, United States Naval Academy, H.K. Charles, Jr., R.L. Edwards, A.C. Keeney, S.F. Wilderson, Johns Hopkins University |
| 2:40pm | MM-TuA3 Invited Paper Design and Process Integration of an Electric Induction Micromotor C. Livermore, J.L. Steyn, Massachusetts Institute of Technology, J.U. Yoon, A. Forte, MIT Lincoln Laboratory, R. Khanna, Massachusetts Institute of Technology, T. Lyszczarz, MIT Lincoln Laboratory, S.D. Umans, J.H. Lang, Massachusetts Institute of Technology |
| 3:20pm | MM-TuA5 Microfabrication of a Pressure Sensor Array Using 3D Integration Technology M. Khbeis, Laboratory for Physical Sciences, X. Tan, University of Maryland, G. Metze, Laboratory for Physical Sciences, R. Ghodssi, University of Maryland |
| 3:40pm | MM-TuA6 Simulation of Field Emission-based Pressure Sensors A.M. Nair, N. Badi, A. Bensaoula, University of Houston |
| 4:00pm | MM-TuA7 Nanotribological Characterization of Digital Micromirror Devices using Atomic Force Microscopy H. Liu, B. Bhushan, Ohio State University |
| 4:20pm | MM-TuA8 PZT Dry Etching using ICP Etcher for MEMS Devices M. Dubey, R.G. Polcawich, E. Zakar, J. Pulskamp, A.E. Wickenden, L.J. Currano, U.S. Army Research Laboratory |
| 4:40pm | MM-TuA9 Integration of Silicon Anisotropic Wet Etching and BCB Processes N. Ghalichechian, A. Modafe, R. Ghodssi, University of Maryland, College Park |
| 5:00pm | MM-TuA10 Optical Characterization of Poly-Dimethyl Siloxane (PDMS) during Inductively Coupled Plasma Processing for Implementation in a PDMS-based Photonic Crystal* E.A. Joseph, L.J. Overzet, M.J. Goeckner, D.S. Park, M. Tinker, J.B. Lee, University of Texas - Dallas |