AVS 50th International Symposium
    Microelectromechanical Systems (MEMS) Tuesday Sessions
       Session MM-TuA

Paper MM-TuA7
Nanotribological Characterization of Digital Micromirror Devices using Atomic Force Microscopy

Tuesday, November 4, 2003, 4:00 pm, Room 320

Session: Fabrication and Characterization of MEMS Devices
Presenter: H. Liu, Ohio State University
Authors: H. Liu, Ohio State University
B. Bhushan, Ohio State University
Correspondent: Click to Email
Texas Instruments' Digital Micromirror Device (DMD) comprises an array of fast digital micromirrors, monolithically integrated onto and controlled by an underlying silicon memory chip.@footnote 1@ It is one of the few success stories in the emerging field of microelectromechanical systems (MEMS). In this study, atomic force microscopy (AFM) has been used to characterize the elements of the mirror structure of the DMD. AFM images of the mirror, hinge and yoke, and metal arrays are characterized. An AFM methodology was developed to identify and remove mirrors of interest. The surface roughness and adhesion properties of contacting surfaces were extensively studied. The influence of relative humidity and temperature on the behavior of the DMD was also investigated. Potential mechanisms for stiction accrual@footnote 2@ are discussed in light of the findings. @FootnoteText@ @footnote 1@L.J. Hornbeck, MRS Bulletin, 26, 325(2001) @footnote 2@B. Bhushan, (ed.), Tribology Issues and Opportunities in MEMS, (Kluwer Academic, Dordrecht, Netherlands, 1998).