AVS 50th International Symposium
    High-k Gate Dielectrics and Devices Topical Conference Tuesday Sessions

Session DI-TuA
High-k Dielectric Characterization

Tuesday, November 4, 2003, 2:00 pm, Room 317
Moderator: E.L. Garfunkel, Rutgers University


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Click a paper to see the details. Presenters are shown in bold type.

2:40pm DI-TuA3 Invited Paper
Invited Paper
E. Cartier, IBM T.J. Watson Research Center
3:20pm DI-TuA5
Enhanced Tunneling in Symmetric Stacked Gate Dielectrics with Ultra-thin HfO@sub 2@ Layers (0.5-10. nm) Sandwiched between Thicker SiO@sub 2@ Layers (1.5 nm)
C.L. Hinkle, C. Fulton, G. Lucovsky, R.J. Nemanich, North Carolina State University
3:40pm DI-TuA6
Observation of Bulk HfO@sub 2@ Defects by Spectroscopic Ellipsometry
H. Takeuchi, D. Ha, T.-J. King, University of California at Berkeley
4:00pm DI-TuA7
Chemically Abrupt Interfaces between Lanthanum Aluminate and Silicon for Alternative Gate Dielectric Applications
L.F. Edge, D.G. Schlom, Pennsylvania State University, S.A. Chambers, Pacific Northwest National Laboratory, C.L. Hinkle, G. Lucovsky, North Carolina State University
4:20pm DI-TuA8
Medium Energy Ion Scattering Studies of the Structure and Composition of Epitaxial SrTiO@sub 3@ Films on Silicon
L.V. Goncharova, D.G. Starodub, E.L. Garfunkel, T. Gustafsson, Rutgers University, D.G. Schlom, Pennsylvania State University
4:40pm DI-TuA9
In-situ and Ex-situ Characterization of Barium Strontium Titanate Thin Films on Thermal SiO@sub 2@/Si Substrates
N.A. Suvorova, C.M. Lopez, University of North Carolina, Chapel Hill, A.A. Suvorova, M. Saunders, University of Western Australia, E.A. Irene, University of North Carolina, Chapel Hill
5:00pm DI-TuA10
Band Offsets at Ba- SrTiO@sub 3@ / Si Interfaces
F. Amy, A. Wan, A. Kahn, Princeton University