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    Plasma Science Tuesday Sessions
       Session PS1-TuM

Paper PS1-TuM7
c-C@sub 4@F@sub 8@/Ar Inductively Coupled Plasma Characterization

Tuesday, October 30, 2001, 10:20 am, Room 103

Session: Diagnostics II
Presenter: M.T. Radtke, University of California, Berkeley
Authors: M.T. Radtke, University of California, Berkeley
J.W. Coburn, University of California, Berkeley
D.B. Graves, University of California, Berkeley
Correspondent: Click to Email
A study of the composition and structure of a c-C@sub 4@F@sub 8@/argon inductively coupled plasma is reported. In this study, we first measured discharge properties (plasma density, potential and electron energy distribution function) in a pure Ar discharge using a Langmuir probe. In subsequent experiments, small amounts of c-C@sub 4@F@sub 8@ were added to argon and the ion and neutral plasma composition was measured using separate quadrupole mass spectrometers. Neutral species number densities were measured using a calibrated, molecular beam sampled, appearance potential mass spectrometer. The dominant radicals were CF@sub 2@ and CF@sub 3@. Positive ions were measured in a separate mass spectrometer. The dominant positive ions were Ar@super +@, CF@super +@, CF@sub 2@@super +@, CF@sub 3@@super +@, C@sub 2@F@sub 4@@super +@, and C@sub 3@F@sub 5@@super +@. The neutral gas temperature was estimated using optical emission spectroscopy of the rotational temperature of trace N@sub 2@ in an argon discharge. Using the measurements, the total dissociation rate coefficients for c-C@sub 4@F@sub 8@ were estimated with a volume-averaged balance on c-C@sub 4@F@sub 8@ for each of the experimental conditions. From the measured EEDFs and the total dissociation rate coefficients, we tested a proposed total dissociation cross section. The proposed cross section was found to be consistent with the measured values to within the experimental uncertainty.