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    Plasma Science Tuesday Sessions
       Session PS1-TuM

Paper PS1-TuM3
Time-Resolved CF@sub 2@ Rotational Temperature Measurements in Inductively-Coupled Pulsed Plasmas

Tuesday, October 30, 2001, 9:00 am, Room 103

Session: Diagnostics II
Presenter: T.M. Bauer, University of New Mexico
Authors: X. Wu, University of New Mexico
T.M. Bauer, University of New Mexico
J.L. Cecchi, University of New Mexico
Correspondent: Click to Email

We have measured the time evolution of the rotational temperature of CF@sub 2@ in pulsed plasmas. These measurements were performed in an inductively coupled plasma (ICP) reactor with a CHF@sub 3@/Ar gas mixture. We have explored a range of ICP powers of 300 to 900 W and a range of total pressure from 10 to 30 mTorr. The rotational temperature of CF@sub 2@ was determined from absorbance measurements, using a wavelength-modulated diode laser spectroscopy system, modified to provide data with a time resolution of less than 0.1 ms. The @nu@1 band @super R@Q@sub 8@ of CF@sub 2@ eo<->oe and ee<->oo rotational lines J=16, 18, 19, 21-23 are used for analysis. >From the dependence of the line intensities on the energy of the lower state, we are able to extract the rotational temperature. Pulse frequency was varied from 4 to 20 Hz at duty factors from 10 to 50%. The CF@sub 2@ rotational temperature time evolution is characterized by a first order rise upon plasma ignition to a temperature that coincides with the steady state rotational temperature, providing the plasma-on time exceeds the heating time constant, which is typically in the range of 2-5 ms. Once the plasma is extinguished, rotational temperature shows first order decay to about 290 ± 20K. The time constant for this decay is in the range of 5-10 ms.