AVS 47th International Symposium
    Thin Films Wednesday Sessions

Session TF+EL-WeA
In-situ Characterization of Thin Film Growth

Wednesday, October 4, 2000, 2:00 pm, Room 203
Moderator: M.C.M. van de Sanden, Eindhoven University of Technology, The Netherlands


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Click a paper to see the details. Presenters are shown in bold type.

2:00pm TF+EL-WeA1
Monitoring of Thin Film Metallization by Metastable He Atom Scattering
G. Witte, Lehrstuhl fuer Physikalische Chemie I, Germany, P. Fouquet, Physikalische Chemie I, RUB, Germany
2:20pm TF+EL-WeA2
Ultraviolet Absorption Spectroscopy of Polytetrafluoroethylene Deposition by Pyrolytic CVD
B.A. Cruden, K.K. Gleason, H.H. Sawin, Massachusetts Institute of Technology
2:40pm TF+EL-WeA3
Near-edge Valence Band Structure of Amorphous Hydrogenated SiC Thin Films by a Combined use of Auger and Photoemission Processes
M.-H. Lee, F.S. Ohuchi, University of Washington
3:00pm TF+EL-WeA4
Growth of Oxygen-rich Films on Ru(0001)
A. Böttcher, B. Krenzer, W. Stenzel, H. Conrad, Fritz-Haber-Institut, Germany, H. Niehus, Humboldt-Universität, Germany
3:20pm TF+EL-WeA5 Invited Paper
In-situ Characterization of Thin Film Growth
W. Fukarek, Research Center Rossendorf, Germany
4:00pm TF+EL-WeA7
Characterization of the Phase Evolution of Boron Nitride Thin Films using Real Time Multichannel Ellipsometry from 1.5 to 6.5 eV
J.A. Zapien, R. Messier, R.W. Collins, The Pennsylvania State University
4:20pm TF+EL-WeA8
Deposition of Hard Amorphous Hydrogenated Carbon Films from Hyperthermal Hydrocarbon Radicals, Studied by In Situ Real Time Infrared Spectroscopy
A. von Keudell, Max-Planck-Institut für Plasmaphysik, Germany, K.Y. Letourneur, M.C.M. van de Sanden, TU Eindhoven, Netherlands
4:40pm TF+EL-WeA9
In-Situ Monitoring of Adsorption and Film Growth Using Infrared Reflection Absorption Spectroscopy
V.M. Bermudez, W.J. DeSisto, Naval Research Laboratory
5:00pm TF+EL-WeA10
Investigation of the Subsonic Beam behaviour of an Expanding Thermal Plasma used to Deposit Silicondioxide like Films
M.F.A.M van Hest, D.C. Schram, M.C.M. van de Sanden, Eindhoven University of Technology, The Netherlands