AVS 47th International Symposium
    Plasma Science and Technology Wednesday Sessions
       Session PS1+MS-WeA

Invited Paper PS1+MS-WeA2
Sensors and Control in Plasma Processing

Wednesday, October 4, 2000, 2:20 pm, Room 310

Session: Sensors and Control in Plasma Processing
Presenter: J.C. Arnold, Motorola Semiconductor Products Sector
Authors: J.C. Arnold, Motorola Semiconductor Products Sector
M.J. Hartig, Motorola Semiconductor Products Sector
C.F. Pfeiffer, Motorola Semiconductor Products Sector
J.A. Rivers, Motorola Semiconductor Products Sector
M.L. Johnson, Motorola Semiconductor Products Sector
Correspondent: Click to Email
Even with the entrance of such processes as CMP and electrochemical deposition into the mainstream of semiconductor manufacturing, plasma processes remain among the most complex processes in the fab as well as among the most difficult to sustain. Furthermore, plasma deposition, etching, and cleaning processes are so numerous in typical product flows that the potential economic impact of plasma tool or process breakdowns is tremendous. The impetus for application of advanced sensors and automatic controls to these processes has been clear for years; however, widespread deployment of these devices and techniques in high volume manufacturing has been elusive. In this presentation, we will examine reasons for the apparent weakness in the pace at which sensors and controls have been adopted. We will begin with consideration of the terms "sensor" and "control" as related to the current state of the art in plasma processing. We will evaluate some of the sensor and control industry's current offerings in the context of the sensor and factory CIM system's ability to provide the "Acquisition - Analysis - Action" chain of three characteristics which we believe to be essential for adding value in the manufacturing environment. Finally, we will offer some end user perspectives on how changes in the business relationships between sensor and software vendors, capital equipment suppliers, and device manufacturers would facilitate more rapid and effective transfer of new techniques from the research lab to the production floor.