AVS 47th International Symposium
    Plasma Science and Technology Wednesday Sessions
       Session PS-WeP

Paper PS-WeP7
Measurements of Plasma-wave Interactions in a Commercial-scale Helicon-driven Plasma Processing Reactor

Wednesday, October 4, 2000, 11:00 am, Room Exhibit Hall C & D

Session: Poster Session
Presenter: J.E. Norman, University of Illinois, Urbana-Champaign
Authors: J.E. Norman, University of Illinois, Urbana-Champaign
D.N. Ruzic, University of Illinois, Urbana-Champaign
N. Li, University of Illinois, Urbana-Champaign
M.E. Boaz, University of Illinois, Urbana-Champaign
J.P. Allain, University of Illinois, Urbana-Champaign
Correspondent: Click to Email
Measurements of plasma-wave interactions in a commercial-scale helicon-driven plasma processing reactor A Plasma Quest 256 research reactor powered by a PMT Mori 200 Helical plasma source has been used to study plasma wave interactions. Magnetically enhanced inductively coupled plasmas can operate in very different modes and operating regimes simply through external control. The ability to quickly change from one operating mode and plasma condition to another may allow the creation of multi-functioning processing environments: one machine that can replace many of the single-step chambers now required during semiconductor fabrication. To demonstrate this principle, Langmuir probe and spectroscopic measurements show that radically different plasmas can be produced through electrical and magnetic variation. Modeling has also been done which elucidates the physical mechanisms involved in the electromagnetic energy transfer to the plasma.