AVS 47th International Symposium
    Plasma Science and Technology Wednesday Sessions
       Session PS-WeP

Paper PS-WeP3
Analysis of Chlorine-Containing Plasmas with Langmuir Probes, Self-Excited Electron Resonance Spectroscopy, and Optical Emission Spectroscopy

Wednesday, October 4, 2000, 11:00 am, Room Exhibit Hall C & D

Session: Poster Session
Presenter: G. Franz, INFINEON Technologies, Germany
Authors: G. Franz, INFINEON Technologies, Germany
P. Messerer, Technical University, Germany
Correspondent: Click to Email
Capacitively coupled discharges of strongly reactive atmospheres, containing mixtures of boron trichloride and chlorine, are investigated employing spatially resolved Langmuir probe measurements, optical emission spectroscopy, and self-excited electron resonance spectroscopy. The analysis covers the whole area spanned by these gases from pure boron trichloride to pure chlorine, discharge pressure over more than one magnitude, and RF power half an order of magnitude. Their impact is addressed on important plasma parameters like plasma density, plasma potential, electron temperature, electron collision rate with neutrals, and actual RF power coupled into the discharge. Since the methods are partially complementary, a mutual control of the obtained data is made possible. Whereas the concordance in electron plasma density is surprisingly good, the discrepancies in the determination of the electron temperature lead to the conclusion that the electron energy distribution must be described with two temperatures. Compared to discharges of inert gases, which are used as calibration standard, electron plasma density and electron temperature are both definitely lower, which is mainly caused by electron attachment of the electronegative molecules. Absolutely no chlorine could be found in the plasma which is referred rather to the effective cooling of the Cl-containing species than to the nonexistence of these species.