| AVS 46th International Symposium | |
| Electronic Materials and Processing Division | Thursday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | EM2-ThA1 Invited Paper Silicon Carbide: Material of the 21st Century? P.G. Soukiassian, Université de Paris-Sud/Orsay, France |
| 2:40pm | EM2-ThA3 Characterization of PECVD SiC and its Application in Advanced Reticle Technology-SCALPEL Membrane S. Han, W.J. Dauksher, P.J.S. Mangat, K.D. Cummings, S.M. Smith, Motorola, Inc. |
| 3:00pm | EM2-ThA4 Contact Properties of Cerium Ultrathin Film on SiC W.J. Lu, D.T. Shi, T. Crenshaw, A. Burger, W.E. Collins, Fisk University |
| 3:20pm | EM2-ThA5 A Thermodynamic Analysis of Silicide and Carbide Formation and Stability of W, Co, V, and Zr Thin Films on Single-Crystal SiC W.F. Seng, M.J. Bozack, P.A. Barnes, Auburn University, S.A. Catledge, Y.K. Vohra, University of Alabama at Birmingham |
| 3:40pm | EM2-ThA6 Deposition of Yttrium Oxide by Yttrium Sputter/Thermal Oxidation and Reactive Sputtering for Advanced High k Gate Dielectrics J.J. Chambers, G.N. Parsons, North Carolina State University |
| 4:00pm | EM2-ThA7 Bi@sub 4@Ti@sub 3@O@sub 12@ Ferroelectric Thin Films Deposited on Silicon by Pulse Injection Metal-Organic Chemical Vapor Deposition S.K. Lee, H.J. Kim, Seoul National University, Korea |
| 4:20pm | EM2-ThA8 Film-Formation Mechanisms and Step Coverage of (Ba,Sr)TiO@sub 3@ Films Grown by MOCVD Y. Gao, T.T. Tran, S. Thevuthasan, M.H. Engelhard, Pacific Northwest National Laboratory, P. Alluri, Motorola, Inc. |
| 4:40pm | EM2-ThA9 Anhydrous Zirconium (IV) Nitrate as a CVD Precursor for ZrO@sub 2@ R. Smith, N. Hoelien, C. Taylor, T. Ma, S. Campbell, W.L. Gladfelter, J.T. Roberts, University of Minnesota, M. Copel, D.A. Buchanan, IBM T.J. Watson Research Center, M. Gribelyuk, IBM |
| 5:00pm | EM2-ThA10 A New Approach for the Fabrication of Device-Quality Ge/GeO@sub 2@/SiO@sub 2@ Interfaces Using Low Temperature Remote Plasma Processing R.S. Johnson, H. Niimi, G. Lucovsky, North Carolina State University |