| AVS 45th International Symposium | |
| Vacuum Metallurgy Division | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:20am | VM+TF-MoM1 Invited Paper Ionised PVD and Filtered Arc Deposition; Processes, Properties and Applications P.J. Martin, A. Bendavid, CSIRO, Australia, H. Takikawa, Toyohashi University, Japan |
| 9:00am | VM+TF-MoM3 Transport of a Cathodic-Arc Plasma Through a Linear-Solenoid Macroparticle Filter B.P. Cluggish, B.P. Wood, Los Alamos National Laboratory |
| 9:20am | VM+TF-MoM4 Characterization of Magnetron-Sputtered Partially Ionized Deposition as a Function of Metal and Gas Species M.M.C. Allain, D.B. Hayden, D.R. Juliano, D.N. Ruzic, University of Illinois, Urbana-Champaign |
| 9:40am | VM+TF-MoM5 Effects of Coil dc Potential on Ion Energy Distribution Measured by an Energy-resolved Mass Spectrometer in Ionized Physical Vapor Deposition E. Kusano, T. Kobayashi, N. Kikuchi, K. Fukushima, T. Saitoh, S. Saiki, H. Nanto, A. Kinbara, Kanazawa Institute of Technology, Japan |
| 10:00am | VM+TF-MoM6 Modeling of Large Cluster Synthesis A. Hosseini-Tehrani, F.K. Urban III, Florida International University |
| 10:20am | VM+TF-MoM7 Combined Monte Carlo and Fluid Sputter Transport Model in an Ionized PVD System with Experimental Plasma Characterization D.R. Juliano, D.B. Hayden, M.M.C. Allain, D.N. Ruzic, University of Illinois, Urbana |
| 10:40am | VM+TF-MoM8 Plasma Diagnostics of Magnetic Field Assisted Ionized Magnetron Sputtering J.H. Joo, Kunsan National University, Korea |
| 11:00am | VM+TF-MoM9 Study of Thin Films Deposited from a Copper Beam Formed in an Argon Atmosphere Capable of Condensing Nanoparticles F.K. Urban, A. Khabari, A. Housseini-Tehrani, P. Griffiths, G. Fernandez, Florida International University |
| 11:20am | VM+TF-MoM10 Novel (111)-Textured AlCu Growth by Ionized Metal Plasma (IMP) Ti Underlayer J.-B. Lai, L.-J. Chen, National Tsing-Hua University, Republic of China, C.-S. Liu, Taiwan Semiconductor Manufacturing Company, Republic of China |
| 11:40am | VM+TF-MoM11 Plasma Polymerization of Fluorine Alloyed Amorphous Carbon Coatings A. Vanhulsel, J.-P. Celis, KU Leuven, Belgium, E. Dekempeneer, J. Smeets, VITO, Belgium |