AVS 45th International Symposium
    Vacuum Metallurgy Division Monday Sessions
       Session VM+TF-MoM

Paper VM+TF-MoM6
Modeling of Large Cluster Synthesis

Monday, November 2, 1998, 10:00 am, Room 328

Session: Ionized-PVD: Processes, Properties, and Applications
Presenter: A. Hosseini-Tehrani, Florida International University
Authors: A. Hosseini-Tehrani, Florida International University
F.K. Urban III, Florida International University
Correspondent: Click to Email
The original idea of the ionized cluster beam (ICB) thin film deposition technique was based upon producing, ionizing and accelerating beams of atoms clusters from vaporized material onto a substrate in a vacuum environment, using a supersonic jet source. Simulation of this process using classical nucleation theory and one dimensional gas flow equations will be presented. This approach is an extension of previous methods used for simulation of condensation of water vapor during supersonic expansion in nozzles and simulation mechanism of large clusters from vaporized solid materials. Zinc cluster sizes predicted by the model are in qualitative and quantitative agreement with our experimental results. Simulation results will be presented for different materials as well. Recently, other methods of synthesizing clusters and nanoparticles, using different types of cluster source, like magnetron sputtering mounted in a cooled chamber, have come under development. We are in the process of extending the model for the magnetron sputtering gas aggregation cluster source and will present new results for this process.