AVS 45th International Symposium
    Thin Films Division Thursday Sessions

Session TF-ThM
Thin Films for Flat Panel Applications

Thursday, November 5, 1998, 8:20 am, Room 310
Moderator: G.N. Parsons, North Carolina State University


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:20am TF-ThM1 Invited Paper
New Dry Etch Applications for Amorphous TFTs in Flat Panel Displays(FPD)
W.W. Yao, dpiX; A Xerox New Enterprise Company
9:00am TF-ThM3
Field Emission and Photo Emission from Si Micro Tip Arrays Coated with Bias-Grown Diamond Films
M.Q. Ding, A.R. Krauss, O. Auciello, D.M. Gruen, T.D. Corrigan, Argonne National Laboratory, M.E. Kordesch, Ohio University, D. Temple, D. Palmer, G.E. McGuire, MCNC
9:20am TF-ThM4
Hydrogen Concentration Distribution in Plasma Deposited Hydrogenated Amorphous Silicon and Silicon Nitride Films
B.F. Hanyaloglu, D.C. Marra, E.S. Aydil, University of California, Santa Barbara
9:40am TF-ThM5 Invited Paper
Poly-Si Thin Film Transistors Fabricated on Low Temperature Plastic Substrates
P.G. Carey, P.M. Smith, P. Wickbolt, S.D. Theiss, Lawrence Livermore National Laboratory
10:20am TF-ThM7
Stability of Very Low Temperature Amorphous Silicon Thin Film Transistors on Flexible Plastic Substrates
C.S. Yang, L.L. Smith, C.B. Arthur, G.N. Parsons, North Carolina State University
10:40am TF-ThM8
Advanced Deposition Technique for Producing Thin Films of Polycrystalline Silicon
J.B.O. Caughman, D.B. Beach, G.L. Bell, Oak Ridge National Laboratory
11:00am TF-ThM9
Polycrystalline Silicon Films Deposited Directly on Glass by Reactive Magnetron Sputtering Using a Microcrystalline Silicon Nucleation Layer
D.S. Kim, Samsung Advanced Institute of Technology, Korea, J.E. Gerbi, J.R. Abelson, University of Illinois, Urbana-Champaign