AVS 45th International Symposium
    Thin Films Division Thursday Sessions
       Session TF-ThM

Invited Paper TF-ThM5
Poly-Si Thin Film Transistors Fabricated on Low Temperature Plastic Substrates

Thursday, November 5, 1998, 9:40 am, Room 310

Session: Thin Films for Flat Panel Applications
Presenter: P.G. Carey, Lawrence Livermore National Laboratory
Authors: P.G. Carey, Lawrence Livermore National Laboratory
P.M. Smith, Lawrence Livermore National Laboratory
P. Wickbolt, Lawrence Livermore National Laboratory
S.D. Theiss, Lawrence Livermore National Laboratory
Correspondent: Click to Email
Flat panel displays made on plastic substrates are envisioned for use in certain commercial and military systems because they are more rugged and lightweight than displays made on glass substrates. High information content can be attained for such displays using active matrix arrays of thin film transistors (TFTs). In this talk the fabrication of poly-Si TFTs on flexible plastic substrates will by discussed. Plastic substrates pose severe temperature constraints on the fabrication process. To overcome these constraints, our group at LLNL has used low temperature (<150C) silicon, oxide, and aluminum thin film deposition steps and pulsed excimer laser processing to perform the TFT channel crystallization and the source/drain doping.