| 2:00pm |
PC-ThA1 Invited Paper
Semiconductor Applications of a Quadrupole Mass Spectrometer
R.K. Waits, MKS Instruments |
| 2:40pm |
PC-ThA3 Invited Paper
In Situ Monitoring of Semiconductor Reactive Gas Processes using Partial Pressure Analyzers
L.C. Frees, Leybold Inficon, Inc. |
| 3:20pm |
PC-ThA5
Emission Free Measurement of Residual Gas in XHV Using Ionization by Trapped Electrons in Magnetic Field
A. Yamamoto, S. Kato, KEK, Japan |
| 3:40pm |
PC-ThA6
Residual Gas Analyzer Ion Current Measurement, Calibration and Partial Pressure Detection Limits
R.E. Ellefson, A.J. Kubis, L.C. Frees, Leybold Inficon, Inc. |
| 4:00pm |
PC-ThA7 Invited Paper
Practical Quadrupole Theory: RGA Characteristics
R.E. Pedder, ABB Extrel |
| 4:40pm |
PC-ThA9
Residual Gas Analyzer Performance Characteristics
C.R. Tilford, National Institute of Standards and Technology, T. Gougousi, University of Maryland |
| 5:00pm |
PC-ThA10
Calibration of Gas-Analytic Mass Spectrometers for Gases and Vapors
R. Dobrozemsky, G.W. Schwarzinger, Vienna University of Technology, Austria |