AVS 45th International Symposium
    Partial Pressure Measurements and Process Control Topical Conference Thursday Sessions
       Session PC-ThA

Invited Paper PC-ThA7
Practical Quadrupole Theory: RGA Characteristics

Thursday, November 5, 1998, 4:00 pm, Room 317

Session: RGA Characteristics and Calibration
Presenter: R.E. Pedder, ABB Extrel
Correspondent: Click to Email

Residual Gas Analyzers (RGA's) are commonly used to monitor the partial pressures of contaminants, process gases and reaction gases in various vacuum processes. Quadrupole mass filters can be used as RGA's through the application of RF and DC voltages in such a way as to make ions of a single mass or narrow range of masses to transmit through the quadrupole to the detector. The physics that describes the trajectories of these ions through this electrodynamic field is well studied. The performance characteristics that can be inferred from such trajectories have been predicted through both analytical and numerical methods. Unfortunately, the mathematics involved, while straightforward, is often beyond the comfort level of the practical experimentalist. This presentation will include a broad review of practical quadrupole theory, utilizing graphical means to illustrate the indicators to quadrupole performance, and avoiding all but the most straightforward equations. The goal of this presentation is to provide a more intuitive understanding of quadrupole operation, with emphasis on practical issues. Key performance figures of merit will be identified along with a practical analysis of the theoretical indicators to performance (e.g. transmission/sensitivity is proportional to the square of the rod diameter, resolution and abundance sensitivity increase with increasing RF frequency). Performance characteristics of a wide spectrum of analyzers will be compared. The performance compromises that are inherent in the optimization of quadrupole analyzer characteristics for a given application will be reviewed.