AVS 45th International Symposium
    Partial Pressure Measurements and Process Control Topical Conference Thursday Sessions
       Session PC-ThA

Paper PC-ThA9
Residual Gas Analyzer Performance Characteristics

Thursday, November 5, 1998, 4:40 pm, Room 317

Session: RGA Characteristics and Calibration
Presenter: C.R. Tilford, National Institute of Standards and Technology
Authors: C.R. Tilford, National Institute of Standards and Technology
T. Gougousi, University of Maryland
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Reliable process monitoring and control require reliable instrumentation. Residual gas analyzers (RGAs) are promising candidates for these applications, but only if they are properly adjusted and used. The National Institute of Standards and Technology’s (NIST) earlier work on the performance characterization and calibration of conventional, or open-source RGAs, is being extended in collaboration with the University of Maryland. This new work includes the characterization of closed-source RGAs, the development of in situ RGA calibration techniques for use in a CVD tungsten deposition tool, and the application of the calibrated RGAs in the monitoring and control of the tungsten deposition process. This talk describes fundamental characteristics of RGAs that limit their performance, and techniques to detect and minimize these undesirable characteristics. Particular attention is paid to operating conditions that cause the sensitivity for one gas to depend on the pressures of other gases.