AVS 45th International Symposium
    Nanometer-scale Science and Technology Division Thursday Sessions

Session NS-ThM
Nanoscale Patterning and Modification

Thursday, November 5, 1998, 8:20 am, Room 321/322/323
Moderator: J.F. Wendelken, Oak Ridge National Laboratory


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:20am NS-ThM1
Fabrication of Nanometer Size Photoresist Wire Patterns with a Silver Nanocrystal Shadowmask
S. Choi, K.L. Wang, University of California, Los Angeles, M. Leung, G. Stupian, N. Presser, The Aerospace Corporation, S. Chung, G. Markovich, S. Kim, J.R. Heath, University of California, Los Angeles
8:40am NS-ThM2
Fabrication and Structuring of Ordered Two-Dimensional Nanopore Arrays in Anodic Alumina
A.P. Li, F. Mueller, A. Birner, K. Nielsch, U.M. Goesele, Max-Planck-Institute of Microstructure Physics, Germany
9:00am NS-ThM3
Chemically Assisted Ion-Beam Etching of Submicrometer Features in GaSb-based Quantum Wells
G. Nagy, R.U. Ahmad, M. Levy, R.M. Osgood, Jr., Columbia University, M.J. Manfra, G.W. Turner, Massachusetts Institute of Technology
9:20am NS-ThM4
Nanometer-scale Sputter-Induced Rippling of the SiO@sub2@ Surface Characterized with Real-Time X-ray Scattering
C.C. Umbach, Cornell University, R.L. Headrick, Cornell High Energy Synchrotron Source, B.H. Cooper, J.M. Blakely, Cornell University, E. Chason, Sandia National Laboratories
9:40am NS-ThM5
Materials Considerations for Optical Lithography at the Nanometer Scale
F.A. Houle, W.D. Hinsberg, M.I. Sanchez, J. Hoffnagle, M. Morrison, C. Nguyen, IBM Almaden Research Center
10:00am NS-ThM6
Nanofabrication of Organic Thin Film Materials Using Scanning Probe Lithography
G. Liu, S. Xu, K. Wadu-Mesthrige, Y. Qian, Wayne State University
10:20am NS-ThM7
Proximity X-ray Lithography of Siloxane and Polymer Films Containing Benzyl Chloride Functional Groups
S.L. Brandow, W.J. Dressick, C.S. Dulcey, Naval Research Laboratory, H. Witschi, P.F. Nealey, University of Wisconsin
10:40am NS-ThM8
Nanofabrication of Apertures for Single Quantum Dot Spectroscopy
D. Park, C.R.K. Marrian, D. Gammon, R. Bass, P. Isaacson, E. Snow, Naval Research Laboratory
11:00am NS-ThM9
Nanolithography and Macromolecular PMMA
E.A. Dobisz, S.L. Brandow, R. Bass, L.M. Shirey, Naval Research Laboratory
11:20am NS-ThM10
Indium Phosphide Nanocrystals formed by Sequential Ion Implantation into Fused Silica
D.O. Henderson, R. Mu, A. Ueda, M.H. Wu, D. Denmark, Fisk University, C.W. White, A. Meldrum, R.A. Zuhr, Oak Ridge National Laboratory