AVS 45th International Symposium
    Electronic Materials and Processing Division Monday Sessions

Session EM-MoM
Processing for Advanced Technology

Monday, November 2, 1998, 8:20 am, Room 316
Moderator: D. Temple, Microelectronics Center of North Carolina


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:20am EM-MoM1 Invited Paper
SCALPEL: Projection Electron Beam Lithography
L.R. Harriott, Bell Laboratories, Lucent Technologies
9:00am EM-MoM3 Invited Paper
Fundamental Issues in Wafer Bonding and SOI
U.M. Goesele, Max Planck Institute of Microstructure Physics, Germany
9:40am EM-MoM5 Invited Paper
The Fundamental Mechanisms of Silicon Wafer Bonding and Layer Exfoliation
M.K. Weldon, Bell Laboratories, Lucent Technologies
10:20am EM-MoM7 Invited Paper
DARPA High Definition Systems Program
B.E. Gnade, Defense Advanced Research Projects Agency
11:00am EM-MoM9
Field Emission Energy Distributions from Silicon Field Emitter Arrays
J.L. Shaw, H.F. Gray, K. Hobart, Naval Research Laboratory
11:20am EM-MoM10
Effects of Oxygen on Silicon and Platinum-coated Silicon Field Emitter Arrays
W.D. Palmer, D. Temple, D.G. Vellenga, L.N. Yadon, G.E. McGuire, Microelectronics Center of North Carolina
11:40am EM-MoM11
Improved Performance in Thin Film Electroluminescent Phosphors by Fluxing
J.S. Lewis, K.E. Waldrip, M.R. Davidson, D. Moorehead, University of Florida, Gainesville, S.S. Sun, Planar Systems, Inc., P.H. Holloway, University of Florida, Gainesville