AVS 64th International Symposium & Exhibition | |
Plasma Science and Technology Division | Tuesday Sessions |
Session PS+SS-TuA |
Session: | The Science of Plasmas and Surfaces: Commemorating the Career of Harold Winters (ALL INVITED SESSION) |
Presenter: | Sebastian Engelmann, IBM Research Division, T.J. Watson Research Center |
Authors: | S.U. Engelmann, IBM Research Division, T.J. Watson Research Center N.C.M. Fuller, IBM Research Division, T.J. Watson Research Center |
Correspondent: | Click to Email |
From the beginning of its days in semiconductor industry until now, Harold Winters work has very big impact to plasma processes and surface science. Starting with his landmark papers in the 1970’s and 1980’s, much scientific work was inspired by his publications. At IBM itself and industry-wide, many projects were impacted by his work. We will present our view on some of these topics as well as the lasting technological impact that Harold’s work had and it inspired.