AVS 64th International Symposium & Exhibition | |
Advanced Ion Microscopy Focus Topic | Wednesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
2:20pm | HI-WeA1 Invited Paper COLDFIB – The New FIB Source from Laser Cooled Atoms E. Verzeroli, Anne Delobbe, M. Viteau, Orsay Physics, France, D. Comparat, CNRS Lac Orsay, France, A. Houel, M. Reveillard, Orsay Physics, France |
3:00pm | HI-WeA3 FIB Platform Employing a Low-Temperature Ion Source Adam Steele, A. Schwarzkopf, zeroK NanoTech, J.J. McClelland, National Institute of Standards and Technology, B. Knuffman, zeroK NanoTech |
3:20pm | HI-WeA4 Focused Cs Ion Beam Nanomachining and Material Interaction Characterization for Semiconductor Applications Richard Livengood, R. Hallstein, S. Tan, Intel Corporation, USA, Y. Greenzweig, Y. Drezner, A. Raveh, Intel Corporation, Israel, A.V. Steele, B. Knuffman, A. Schwarzkopf, zeroK NanoTech, USA |
4:20pm | HI-WeA7 Invited Paper Spectroscopy in the Focused Ion Beam Robert Hull, Rensselaer Polytechnic Institute, H. Parvaneh, Global Foundries |
5:00pm | HI-WeA9 Spark-discharge Coupled Laser Multicharged Ion Implantation and Deposition System Md Haider Shaim, M. Rahman, O. Balki, H.E. Elsayed-Ali, Old Dominion University |