AVS 64th International Symposium & Exhibition
    Advanced Ion Microscopy Focus Topic Wednesday Sessions

Session HI-WeA
Emerging Ion Sources and Optics

Wednesday, November 1, 2017, 2:20 pm, Room 7 & 8
Moderator: John A. Notte, Carl Zeiss Microscopy, LLC


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Click a paper to see the details. Presenters are shown in bold type.

2:20pm HI-WeA1 Invited Paper
COLDFIB – The New FIB Source from Laser Cooled Atoms
E. Verzeroli, Anne Delobbe, M. Viteau, Orsay Physics, France, D. Comparat, CNRS Lac Orsay, France, A. Houel, M. Reveillard, Orsay Physics, France
3:00pm HI-WeA3
FIB Platform Employing a Low-Temperature Ion Source
Adam Steele, A. Schwarzkopf, zeroK NanoTech, J.J. McClelland, National Institute of Standards and Technology, B. Knuffman, zeroK NanoTech
3:20pm HI-WeA4
Focused Cs Ion Beam Nanomachining and Material Interaction Characterization for Semiconductor Applications
Richard Livengood, R. Hallstein, S. Tan, Intel Corporation, USA, Y. Greenzweig, Y. Drezner, A. Raveh, Intel Corporation, Israel, A.V. Steele, B. Knuffman, A. Schwarzkopf, zeroK NanoTech, USA
4:20pm HI-WeA7 Invited Paper
Spectroscopy in the Focused Ion Beam
Robert Hull, Rensselaer Polytechnic Institute, H. Parvaneh, Global Foundries
5:00pm HI-WeA9
Spark-discharge Coupled Laser Multicharged Ion Implantation and Deposition System
Md Haider Shaim, M. Rahman, O. Balki, H.E. Elsayed-Ali, Old Dominion University