AVS 56th International Symposium & Exhibition
Click a session title to see the papers
| Start Time | Session Code | Session Title |
|---|---|---|
| Monday 8:20am | AS+EM+MS+TF-MoM | Spectroscopic Ellipsometry I |
| Monday 2:00pm | AS+EM+MS+TF-MoA | Spectroscopic Ellipsometry II |
| Monday 2:00pm | PS+MS-MoA | Plasma Challenges at the 22nm Node and Beyond |
| Wednesday 8:00am | BI+AS+BM+MS-WeM | Array-Based Sensors and Diagnostics: Grand Challenges |
| Thursday 8:00am | MS+GR+MI-ThM | Manufacturing Issues for Beyond CMOS Nanoelectronics |
| Thursday 2:00pm | MS-ThA | Manufacturing Issues in Nanoelectronics, PV and SSL |
| Thursday 2:00pm | BM+MN+MS+TF+BI-ThA | Advances in Microfluidics for BioMEMS |