AVS 56th International Symposium & Exhibition


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Manufacturing Science and Technology Sessions

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Start Time Session Code Session Title
Monday 8:20am AS+EM+MS+TF-MoM Spectroscopic Ellipsometry I
Monday 2:00pm AS+EM+MS+TF-MoA Spectroscopic Ellipsometry II
Monday 2:00pm PS+MS-MoA Plasma Challenges at the 22nm Node and Beyond
Wednesday 8:00am BI+AS+BM+MS-WeM Array-Based Sensors and Diagnostics: Grand Challenges
Thursday 8:00am MS+GR+MI-ThM Manufacturing Issues for Beyond CMOS Nanoelectronics
Thursday 2:00pm MS-ThA Manufacturing Issues in Nanoelectronics, PV and SSL
Thursday 2:00pm BM+MN+MS+TF+BI-ThA Advances in Microfluidics for BioMEMS

AVS 56th International Symposium & Exhibition