| AVS 55th International Symposium & Exhibition | |
| MEMS and NEMS | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:20am | MN-MoM1 Invited Paper Integrated Piezoelectric RF MEMS Front-Ends G. Piazza, University of Pennsylvania |
| 9:00am | MN-MoM3 Chemically-Modified Graphene Nanomechanical Resonators M.K. Zalalutdinov, SFA Inc., J.T. Robinson, E.S. Snow, Z. Wei, P.E. Sheehan, J.W. Baldwin, B.H. Houston, Naval Research Laboratory |
| 9:20am | MN-MoM4 Electrical Transduction of Multi-layer Polysilicon Resonators J.D. Cross, B.R. Ilic, Cornell University, M.K. Zalalutdinov, SFA Inc., E. Yilmaz, Cornell University, J.W. Baldwin, B.H. Houston, Naval Research Laboratory, H.G. Craighead, J.M. Parpia, Cornell University |
| 9:40am | MN-MoM5 Selective Detachment of Microspheres using In-Plane Modes of Nanoelectromechanical Oscillators B.R. Ilic, Cornell University, S. Krylov, Tel Aviv University, Israel, M. Kondratovich, H.G. Craighead, Cornell University |
| 10:20am | MN-MoM7 Synthesis and Characterization of Large Area Ultrananocrystalline Diamond (UNCD) Films using Microwave Plasma Chemical Vapor Deposition Process and Integration with CMOS A.V. Sumant, O. Auciello, Argonne National Laboratory, V. Adiga, A. Konicek, University of Pennsylvania, X. Zhong, B. Kabius, Argonne National Laboratory, H. Yuan, Z. Ma, University of Wisconsin-Madison, R. Carpick, University of Pennsylvania |
| 10:40am | MN-MoM8 {100}-Textured PZT Films Grown on Chemically Deposited PbTiO3 Seed Layers for MEMS Applications J. Zhong, S. Kotru, H. Han, R.K. Pandey, The University of Alabama |
| 11:00am | MN-MoM9 Suppression of Anelastic Effects in Micromechanical Resonators from Suspended Al-CNT Nanolaminate Thin-Films Y.D. Kim, J.H. Bak, S.W. Cho, B.Y. Lee, S.R. Lee, K. Char, S. Hong, Y.D. Park, Seoul National University, South Korea |
| 11:20am | MN-MoM10 An Opto-Thermo-Mechanical MEMS Sensor for Direct Thermal Imaging P. Apte, B. Seth, O. Karhade, S. Chiluveru, IIT Bombay, India |
| 11:40am | MN-MoM11 An Optical MEMS Sensor for Catechol Detection P.H. Dykstra, J. Hao, S.T. Koev, University of Maryland, G.F. Payne, University of Maryland Biotechnology Institute (UMBI), L. Yu, R. Ghodssi, University of Maryland |