| AVS 55th International Symposium & Exhibition | |
| MEMS and NEMS | Monday Sessions |
| Session MN-MoM |
| Session: | Integrative Materials and Processes for MEMS/NEMS |
| Presenter: | B.R. Ilic, Cornell University |
| Authors: | B.R. Ilic, Cornell University S. Krylov, Tel Aviv University, Israel M. Kondratovich, Cornell University H.G. Craighead, Cornell University |
| Correspondent: | Click to Email |
Manipulating dynamics of flexural and torsional vibrational modes of micro- and nanoelectromechanical systems (MEMS and NEMS) with external fields has long been a sought-after goal. A widely studied class of NEMS devices consists of surface micromachined mechanical oscillators made of thin film layers patterned into various shapes that operate by motion perpendicular to the plane of the thin film and substrate by bending in their thin direction. Conventional mechanical driving and motion transduction methods typically activate and detect only motion in this "out-of-plane", transverse direction. We previously demonstrated a robust method for driving and detecting the motion of micro- and nano-scale resonators by utilizing optical drive of resonant motion and interferometric detection of that motion by a separate laser. This technique allowed non-invasive activation and interrogation of individual oscillators or arrays of oscillators. We describe here an approach that can activate and detect the perpendicular, in-plane motion of such oscillators. We show that optical fields are efficient for excitation, direct control and measurement of in-plane motion of cantilever-type nanomechanical oscillators. Using optical excitation and interferrometric detection, we dynamically analyzed surface micromachined 200nm and 250nm thick single crystal silicon cantilevers of varying lengths and widths. We also have demonstrated the controlled capture, detection and release of submicrometer particles by the application of forces imparted by the in-plane motion of the resonators. In contrast, the out of plane motion, even in the strong non-linear impact regime, was insufficient for the removal of bound polystyrene spheres. Our results suggest that optical excitation of in-plane mechanical modes provide a unique mechanism for controlled removal of particles bound on the surface of nanomechanical oscillators.