| AVS 55th International Symposium & Exhibition | |
| MEMS and NEMS | Monday Sessions |
| Session MN-MoM |
| Session: | Integrative Materials and Processes for MEMS/NEMS |
| Presenter: | J.D. Cross, Cornell University |
| Authors: | J.D. Cross, Cornell University B.R. Ilic, Cornell University M.K. Zalalutdinov, SFA Inc. E. Yilmaz, Cornell University J.W. Baldwin, Naval Research Laboratory B.H. Houston, Naval Research Laboratory H.G. Craighead, Cornell University J.M. Parpia, Cornell University |
| Correspondent: | Click to Email |
A straightforward means of electrical transduction of resonator motion is investigated using MHz-frequency micromechanical resonators made from multi-layer film stacks. Devices are fabricated using polysilicon films stacked on top of each other with intermediate layers of insulating material. Electrical or optical drive is used to induce motion in the resonators and electrical transduction allows for direct detection of the resonator motion. A variety of structure geometries are investigated, including cantilevers, double-clamped beams, mushrooms, and domes. Quality factors of 1000-10000 are routinely observed. We discuss the transduction mechanism as well as the ability to integrate these kinds of MEMS structures into a standard CMOS foundry process with no added or modified fabrication steps. We show that the multi-layer film stack can be delaminated in the release step, resulting in stacked resonator structures with thin gaps between each vibrating surface. This work was partially supported by the Office of Naval Research, DARPA, and fabrication was performed at the Cornell NanoScale Science and Technology Facility.