AVS 54th International Symposium | |
Thin Film | Thursday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
2:00pm | TF2-ThA1 Computational Study of the Interfacial Structure of Aluminum/α-Alumina B.D. Devine, University of Florida, A. McGaughey, Carnegie-Mellon University, S.R. Phillpot, S.B. Sinnott, University of Florida |
2:20pm | TF2-ThA2 Analytical Simulation of Conformal and Super-Conformal CVD on High Aspect Ratio Vias and Trenches Y. Yang, J.R. Abelson, University of Illinois at Urbana-Champaign |
2:40pm | TF2-ThA3 Invited Paper Computational Investigation of Surface Polymerization by Ion Assisted Deposition W.-D. Hsu, University of Florida, S. Tepavcevic, L. Hanley, University of Illinois at Chicago, S.B. Sinnott, University of Florida |
3:40pm | TF2-ThA6 Modelling, Growth and Characterisation of Stress-Balanced Thin Films on Stress-Free Virtual Substrates S.G. Turner, Imperial College London, UK, L. Yu, Chinese Academy of Sciences, China, K. Chua, M.R. Levy, Imperial College London, UK, X. Li, University of Oxford, UK, J. Zhang, Imperial College London, UK |
4:00pm | TF2-ThA7 Intra- and Interlayer Mass Transport Rates during Layer-By-Layer Homoepitaxial Pt(111) Growth from Hyperthermal Beams (5-50 eV) V. Chirita, D. Adamovic, E.P. Münger, L. Hultman, Linköping University, Sweden, J.E. Greene, University of Illinois, Urbana-Champaign |
4:20pm | TF2-ThA8 Synthesis and Theoretical Modeling of Fullerene-like Phospho-Carbide Compounds A. Furlan, G.K. Gueorguiev, H. Högberg, S. Stafström, L. Hultman, Linköping University, Sweden |
4:40pm | TF2-ThA9 High-Throughput Determination of Sputtered Film Composition: The Importance of Resputtering J.M. Gregoire, M.B. Lobovsky, M.F. Heinz, F.J. DiSalvo, R.B. van Dover, Cornell University |
5:00pm | TF2-ThA10 General Theory of Optical Reflection from a Thin Film on a Solid and its Application to Heteroepitaxy Y.Y. Fei, X.D. Zhu, X. Wang, University of California at Davis, H.B. Lu, G.Z. Yang, Chinese Academy of Sciences |