AVS 54th International Symposium
    Thin Film Thursday Sessions
       Session TF2-ThA

Paper TF2-ThA7
Intra- and Interlayer Mass Transport Rates during Layer-By-Layer Homoepitaxial Pt(111) Growth from Hyperthermal Beams (5-50 eV)

Thursday, October 18, 2007, 4:00 pm, Room 613/614

Session: Computational Aspects of Thin Films
Presenter: V. Chirita, Linköping University, Sweden
Authors: V. Chirita, Linköping University, Sweden
D. Adamovic, Linköping University, Sweden
E.P. Münger, Linköping University, Sweden
L. Hultman, Linköping University, Sweden
J.E. Greene, University of Illinois, Urbana-Champaign
Correspondent: Click to Email

We employ multi-billion time step embedded-atom method molecular dynamics simulations to study homoepitaxial growth of Pt(111) using low-energy (0.2 - 50 eV) hyperthermal Pt fluxes. We deposit 5 monolayers at 1000K and with deposition rates approaching experimental conditions. The results reveal a transition from a three-dimensional (3D) multilayer growth mode to layer-by-layer growth at ~ 20 eV which is maintained for energies of up to 50 eV. In order to determine the mechanisms responsible for the observed change in the growth mode, we resolve, with picosecond resolution, both irradiation-induced and thermally activated processes. This allows us to determine, with unprecedented accuracy, the energy dependence of the net intra- and interlayer migration rates during the deposition process. Results show, that for all energies, irradiation events are completed within 10 ps following energetic impacts and that these processes dictate the growth mode. As expected, thermal migration is not affected by the deposition energy. For Pt deposition energies above 20 eV, the net interlayer migration induced by irradiation is towards the surface. This type of mass transport occurs via exchange mechanisms between surface and sub-surface atoms. On the growing layers, we observe primarily the descent of adatoms at step-edges and the recombination of adatoms with surface vacancies, i.e. mainly thermally activated processes. However, thermally activated net downward migration is an order of magnitude less than irradiation-induced upward migration. Intralayer migration is shown to depend strongly on adatom surface coverage. Results show that adatoms are the primary source of in-layer mass transport, which is observed to peak at a coverage of ~ 0.05 ML. Sputtering is observed to occur for energies higher than 25 eV. However, the yield is too small, less than 1% at 50 eV, to have a significant effect on island nucleation and coalescence kinetics.