AVS 54th International Symposium | |
Thin Film | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
2:00pm | TF-MoA1 Invited Paper Atomic Layers in Nano(bio)technology M. Knez, L. Zhang, S.-M. Lee, Max-Planck-Institute of Microstructure Physics, Germany, A.J. Patil, S. Mann, University of Bristol, UK, K. Nielsch, U. Gösele, Max-Planck-Institute of Microstructure Physics, Germany |
2:40pm | TF-MoA3 Al2O3 and W/Al2O3 Atomic Layer Deposition on Quantities of Multiwalled Carbon Nanotubes A.S. Cavanagh, C.A. Wilson, S.M. George, University of Colorado at Boulder |
3:00pm | TF-MoA4 Molecular Layer Deposition of Alkyl-Aromatic Polyamide Films Q. Peng, R.M. VanGundy, G.K. Hyde, S.M. Stewart, G.N. Parsons, North Carolina State University |
3:40pm | TF-MoA6 Fabrication of Hybrid Inorganic/Organic Multilayers Using Atomic and Molecular Layer Deposition D. Seghete, S.M. George, University of Colorado at Boulder |
4:00pm | TF-MoA7 Optimization of ALD Conformality in Ultra-High Aspect Ratio Nanopores Formed in Anodic Aluminum Oxide Templates E. Robertson, I. Perez, L. Henn-Lecordier, S.J. Son, S.B. Lee, G.W. Rubloff, University of Maryland |
4:20pm | TF-MoA8 Molecular Layer Deposition of Alucone Polymer Films Using Trimethylaluminum and Various Glycols A.A. Dameron, S.D. Davidson, B.B. Burton, J.A. McCormick, A.S. Cavanagh, S.M. George, University of Colorado at Boulder |
4:40pm | TF-MoA9 Film Properties and In-Situ Optical Analysis of TiO2 Layers Synthesized by Remote Plasma ALD W. Keuning, J.L. Van Hemmen, O. Muraza, E. Rebrov, M.C.M. van de Sanden, W.M.M. Kessels, Eindhoven University of Technology, The Netherlands |