AVS 54th International Symposium
    Thin Film Monday Sessions

Session TF-MoA
Emerging Topics in Atomic Layer Deposition

Monday, October 15, 2007, 2:00 pm, Room 613/614
Moderator: S.M. George, University of Colorado at Boulder


  Click here to Download program book for this session  
  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

2:00pm TF-MoA1 Invited Paper
Atomic Layers in Nano(bio)technology
M. Knez, L. Zhang, S.-M. Lee, Max-Planck-Institute of Microstructure Physics, Germany, A.J. Patil, S. Mann, University of Bristol, UK, K. Nielsch, U. Gösele, Max-Planck-Institute of Microstructure Physics, Germany
2:40pm TF-MoA3
Al2O3 and W/Al2O3 Atomic Layer Deposition on Quantities of Multiwalled Carbon Nanotubes
A.S. Cavanagh, C.A. Wilson, S.M. George, University of Colorado at Boulder
3:00pm TF-MoA4
Molecular Layer Deposition of Alkyl-Aromatic Polyamide Films
Q. Peng, R.M. VanGundy, G.K. Hyde, S.M. Stewart, G.N. Parsons, North Carolina State University
3:40pm TF-MoA6
Fabrication of Hybrid Inorganic/Organic Multilayers Using Atomic and Molecular Layer Deposition
D. Seghete, S.M. George, University of Colorado at Boulder
4:00pm TF-MoA7
Optimization of ALD Conformality in Ultra-High Aspect Ratio Nanopores Formed in Anodic Aluminum Oxide Templates
E. Robertson, I. Perez, L. Henn-Lecordier, S.J. Son, S.B. Lee, G.W. Rubloff, University of Maryland
4:20pm TF-MoA8
Molecular Layer Deposition of Alucone Polymer Films Using Trimethylaluminum and Various Glycols
A.A. Dameron, S.D. Davidson, B.B. Burton, J.A. McCormick, A.S. Cavanagh, S.M. George, University of Colorado at Boulder
4:40pm TF-MoA9
Film Properties and In-Situ Optical Analysis of TiO2 Layers Synthesized by Remote Plasma ALD
W. Keuning, J.L. Van Hemmen, O. Muraza, E. Rebrov, M.C.M. van de Sanden, W.M.M. Kessels, Eindhoven University of Technology, The Netherlands