| AVS 54th International Symposium | |
| Thin Film | Monday Sessions |
| Session TF-MoA |
| Session: | Emerging Topics in Atomic Layer Deposition |
| Presenter: | M. Knez, Max-Planck-Institute of Microstructure Physics, Germany |
| Authors: | M. Knez, Max-Planck-Institute of Microstructure Physics, Germany L. Zhang, Max-Planck-Institute of Microstructure Physics, Germany S.-M. Lee, Max-Planck-Institute of Microstructure Physics, Germany A.J. Patil, University of Bristol, UK S. Mann, University of Bristol, UK K. Nielsch, Max-Planck-Institute of Microstructure Physics, Germany U. Gösele, Max-Planck-Institute of Microstructure Physics, Germany |
| Correspondent: | Click to Email |
In nanotechnology biological systems play an increasingly important role, since some of the naturally occurring biological macromolecules show perfect order on the nanoscale. The perfection of the natural organization of molecules is, in particular for the nanotechnology, often a target for imitation, but can almost never be obtained in a similar quality. An alternative way to obtain nano- or microstructures in close similarity to natural ones is their structural replication from inorganic materials or the modification of the chemical or physical properties of such systems by attachment of inorganic materials. Some of the methods applied recently rely on wet-chemistry which frequently leads to non-uniformity or bad quality of the attached materials. The ALD is one method-of-choice for performing such replication and modification experiments, since it offers the unique possibility to cover biological structures with inorganic films as thin as few Angstroms or nanometers. In this way a number of novel nanostructures with interesting properties can be synthesized, however, limited with the deposition processes which can be performed at temperatures below the stability limit of the biological or organic molecular units.