Paper TF-MoA6
Fabrication of Hybrid Inorganic/Organic Multilayers Using Atomic and Molecular Layer Deposition

Monday, October 15, 2007, 3:40 pm, Room 613/614

Inorganic/organic multilayers occur in the nacreous layer of the mollusk shell and are among the strongest structures in nature. These "brick and mortar" composites are known for their high elasticity, toughness, and hardness. In this study, we report the fabrication of alternating inorganic and organic multilayers consisting of inorganic alumina (Al₂O₃) or tungsten (W) in combination with organic alucone polymer. Al₂O₃ atomic layer deposition (ALD) is performed using trimethylaluminum (TMA) and H₂O as the reactants. W ALD is accomplished using WF₆ and Si₂H₆ as the reactants. The organic alucone layer is grown using molecular layer deposition (MLD) with TMA and ethylene glycol as the reactants. The growth of the inorganic/organic multilayers was investigated using in situ quartz crystal microbalance studies. The nucleation of the inorganic Al₂O₃ or W ALD was explored on the alucone layer. The nucleation of the organic alucone MLD was also examined on the Al₂O₃ and W layers. The nucleation behavior provides information about the bonding between the inorganic and organic layers. The adhesion between the inorganic and organic layers is important for the mechanical properties of these multilayer structures. The structure and stability of the inorganic/organic multilayers were also explored using x-ray reflectivity measurements. Future mechanical property studies are planned using a nanoindenter.