| AVS 54th International Symposium | |
| MEMS and NEMS | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:00am | MN-TuM1 Wafer Level Integration of Ultrananocrystalline Diamond (UNCD) Film with CMOS Devices for Monolithically Integrated Diamond MEMS/NEMS-CMOS Systems A.V. Sumant, O. Auciello, Argonne National Lab, H.C. Yuan, Z. Ma, Univ. of Wisconsin-Madison, B. Kabius, Argonne National Lab, V. Adiga, R.W. Carpick, Univ. of Pennsylvania, D.C. Mancini, Argonne National Lab |
| 8:20am | MN-TuM2 Optical Excitation of Higher Flexural and Torsional Modes of Nanoelectromechanical Oscillators B. Ilic, Cornell University, S. Krylov, Tel Aviv University, Israel, M. Kondratovich, H.G. Craighead, Cornell University |
| 8:40am | MN-TuM3 Ultrasensitive, Magnet-tipped Cantilevers for Magnetic Resonance Force Microscopy S.A. Hickman, S.R. Garner, Cornell University, L.E. Harrell, United States Military Academy, B.I. Penkov, S. Kuehn, J.A. Marohn, Cornell University |
| 9:00am | MN-TuM4 Fabrication of Reliable Through-Silicon via (TSV) Interconnects for 3D Stacking I.U. Abhulimen, A. Kamto, Y. Liu, S. Burkett, L. Schaper, University of Arkansas |
| 9:20am | MN-TuM5 Invited Paper Micro and Nano Electro-Mechanical Systems: Technology for Engineering Metamorphosis A. Lal, DARPA |
| 10:40am | MN-TuM9 Self-Packaged Micro Fluorescence Detection Systems S.S. Kim, E. Saeedi, University of Washington, D.R. Meldrum, Arizona State University, B.A. Parviz, University of Washington |
| 11:00am | MN-TuM10 Bi-Directional Transport of Ultra-Low Volume Droplets Using Capacitive Sensing P. Dykstra, X.Z. Fan, M. Mischiati, L.A. Mosher, N.P. Siwak, R. Ghodssi, University of Maryland |
| 11:20am | MN-TuM11 Microfluidic Transport Control Using Remotely Powered Semiconductor Diodes D.N. Petsev, University of New Mexico, S.T. Chang, O.D. Velev, North Carolina State University, V.N. Paunov, University of Hull, UK |
| 11:40am | MN-TuM12 Towards Feedback Control with Integrated Position Sensing in Micromachines M.I. Beyaz, N. Ghalichechian, A. Modafe, R. Ghodssi, University of Maryland |
| 12:00pm | MN-TuM13 An Adaptive Feedback Control Circuit for Resonator Sensors X.Z. Fan, N.P. Siwak, R. Ghodssi, University of Maryland |