AVS 54th International Symposium
    MEMS and NEMS Tuesday Sessions
       Session MN-TuM

Paper MN-TuM9
Self-Packaged Micro Fluorescence Detection Systems

Tuesday, October 16, 2007, 10:40 am, Room 615

Session: Integration and Packaging in MEMS/NEMS
Presenter: S.S. Kim, University of Washington
Authors: S.S. Kim, University of Washington
E. Saeedi, University of Washington
D.R. Meldrum, Arizona State University
B.A. Parviz, University of Washington
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We present a self-packaging micro-fluorescence biosensor chip which assembles fully functional separately fabricated micro-components onto a common substrate. The essential components of the fluorescence based sensor are: 1) an excitation light source, and 2) a means to detect fluorescence emission. AlGaAs LEDs and silicon pn-junction photosensors are self-assembled onto a glass template to meet these requirements. The micro-components range in size from 100 to 300 microns and were specifically designed to optimize and aid in the self-assembly process. The powder-like collection of micro-components are suspended in a liquid and flowed onto a glass substrate. They self-assemble into their receptor site locations through gravity, shape recognition, and capillary forces, resulting in an array of individually addressable fluorescence detection units. Self-assembly provides a number key advantages over traditional packaging and fabrication approaches. First and foremost, it allows us to integrate micron-scale heterogeneous materials together onto a common substrate. This gives us a unique ability to have all the essential components of a fluorescence detection system on chip, without the need for an external scanner device or benchtop system. Second, the self-assembly process is parallel in nature and benefits from economies of scale. Large arrays of devices can be packaged at the same time. We have demonstrated the packaging of a 10K element array onto a plastic substrate. Thousands of individually addressable fluorescence detection units are possible allowing for data acquisition of a large number of samples simultaneously without being limited by the field of view of the optics. Third, self-assembly gives us the ability to use low cost substrates such as glass and plastics. Only small amounts of semiconductor materials are used where they are needed, reducing the total amount used for each device. This has the potential to drive down the overall cost per device low enough to make them disposable, opening new doors to biosensing applicaitons which require a fluorescence detection platform which is both portable and disposable. Potential applications include point-of-care diagnostics, bioterrorism, food/industrial testing, HIV/STD testing in developing countries, and so on. The benefits of mature fluorescence based assays could be realized on a portable and disposable chip-level platform using this approach to device packaging.