| AVS 66th International Symposium & Exhibition | |
| Thin Films Division | Tuesday Sessions |
| Session TF-TuA |
| Session: | Emerging Applications for Thin Films |
| Presenter: | Berg Dodson, Brigham Young University |
| Authors: | B.D. Dodson, Brigham Young University R.C. Davis, Brigham Young University R.R. Vanfleet, Brigham Young University |
| Correspondent: | Click to Email |
Alumina is used as a diffusion barrier in the catalytic synthesis of carbon nanotubes (CNTs). Prior to CNT growth, the alumina film is electrically insulating, but becomes conductive following a CNT growth process. Electrical resistance measurements show how this change in conductivity correlates principally with a carbon CVD process. Low resistances are observed even when no iron is present for the CNT growth and when deposited carbon layers are etched off. TEM (and SIMS) data demonstrate that both iron and carbon can diffuse into the alumina layer during processing. Additionally, I will discuss at how predicted doping levels compare to the observed conductivity of the samples.