AVS 66th International Symposium & Exhibition
    Thin Films Division Thursday Sessions
       Session TF-ThP

Paper TF-ThP5
The Effect of Deposition Parameters on the Optical and Electrical Properties of MoO3/Ag/Mo/ MoO3 Films by Reactive rf Magnetron Sputtering

Thursday, October 24, 2019, 6:30 pm, Room Union Station B

Session: Thin Films Poster Session
Presenter: Wei-Chun Chen, Taiwan Instrument Research Institute, Taiwan
Authors: C.-T. Lee, Taiwan Instrument Research Institute, Taiwan
W.-C. Chen, Taiwan Instrument Research Institute, Taiwan
H.-P. Chen, Taiwan Instrument Research Institute, Taiwan
C.-C. Jaing, Minghsin University of Science and Technology, Japan
Correspondent: Click to Email

Stacked MoO3/Ag/Mo/MoO3 (MAMM) films were deposited on glass substrate as ITO-free and electrochromic applications. The effects of the thickness of Mo layer on the electrical and optical properties of the MAMM films were examined by the four-point probe system and a spectrophotometer. The resistivity of MAMM films was decreased with increasing the thickness of Mo layer. The resistivity of the films were 5000 and 3X10-5 Ω/cm when the thickness of Mo layer was 1 and 2 nm, respectability. It was found that the ITO-free MAMM film as the Mo layer is over 2 nm. The luminous transmittance of MAMM films was decreased with increased the thickness of Mo layer. After the optical simulated, and prepared the electrochromic MAMM films, the MAMM films for hot-mirror and electrocromic applications was also investigated.