| AVS 66th International Symposium & Exhibition | |
| Plasma Science and Technology Division | Thursday Sessions |
| Session PS-ThM |
| Session: | Plasma Diagnostics and Sources II |
| Presenter: | Shin-Jae You, Chungnam National University, Republic of Korea |
| Authors: | S.J. You, Chungnam National University, Republic of Korea S.J. Kim, Chungnam National University, Republic of Korea Dw. Kim, KIMM, Republic of Korea |
| Correspondent: | Click to Email |
Though this paper, we present historial review of our cutoff probe research which has been performed for almost 2 decade. This paper focus on the whole progress for the cutoff probe including how to start to develop the cutoff probe in the initial period, what idea has been included during the development, how to evolve the probe during 17 years. The cutoff probe is most simple diagnostics among the plasma diagnostics tools which was made by simple intuition for the cutoff phenomenon of the plasma wave. However, the cutoff probe has been used for a long time without test of validation of probe itself. Later, EM waver simulation supported the validation for the cutoff frequency determination. Recently, by supposing the circuit modeling, the physics behind for the cut off probe spectrum (S21) was revealed and the accuracy and the application window of the probe were established. Very recently, as an extended version of the circuit model, we makes transmission line modeling to explain the cutoff spectrum in high density plasma as well as low density plasma.
Based on recent developments we also introduce a novel methodology to interpret the probe spectrum that eliminates the sheath and collisional effects and enables the use of this precise diagnostic technique in a broad range of practical processing conditions.