| AVS 66th International Symposium & Exhibition | |
| Advanced Ion Microscopy and Ion Beam Nano-engineering Focus Topic | Thursday Sessions |
| Session HI+NS-ThM |
| Session: | Novel Beam Induced Material Engineering and Nano-Patterning |
| Presenter: | Gregor Hlawacek, Helmholtz-Zentrum Dresden Rossendorf, Germany |
| Authors: | N. Klingner, Helmholtz Zentrum Dresden-Rossendorf, Germany G. Hlawacek, Helmholtz-Zentrum Dresden Rossendorf, Germany L.J. Wheatcroft, University of Sheffield, UK B.J. Inkson, University of Sheffield, UK R. Heller, Helmholtz Zentrum Dresden-Rossendorf, Germany |
| Correspondent: | Click to Email |
Helium Ion Microscopy (HIM) has become a wide spread imaging and nanofabrication technology. However, existing HIM users can currently not perform elemental analysis in an easy and cost efficient way. We present results obtained using a light weight retrofitable Time of Flight Secondary Ion Mass Spectrometer (TOF-SIMS). I will briefly give an overview on new developments in our TOF-SIMS setup which allows to obtain information on the elemental composition of the sample. The lateral resolution for the presented TOF-SIMS add-on has been measured to be 8 nm. A particular advantage of the presented TOF-SIMS implementation is that it allows for charge compensation during data acquisition and thus the elemental analysis of insulators or poorly conducting materials. In addition delayed extraction can be realized which will allow a field free application of the primary beam which reduces aberrations and the setup time. While not a dedicated high mass resolution instrument it allows to answer many scientific questions by combining the high lateral resolution of the HIM with elemental information. The examples include but are not limited to battery materials and corrosion protection of steel.
[1] Nico Klingner, Rene Heller, Gregor Hlawacek, Stefan Facsko, and Johannes von Borany. Time-of-
flight secondary ion mass spectrometry in the helium ion microscope. Ultramicroscopy, 198:10–17,
2019.
[2] Nico Klingner, René Heller, Gregor Hlawacek, J. von Borany, John A. Notte, Jason Huang, and
Stefan Facsko. Nanometer scale elemental analysis in the helium ion microscope using time of flight
spectrometry. Ultramicroscopy, 162:91–97, 2016.