| AVS 66th International Symposium & Exhibition | |
| Spectroscopic Ellipsometry Focus Topic | Wednesday Sessions |
| Session EL+EM-WeA |
| Session: | Spectroscopic Ellipsometry: Novel Applications and Theoretical Approaches |
| Presenter: | Song Zhang, Huazhong University of Science and Technology, China |
| Authors: | S. Zhang, Huazhong University of Science and Technology, China H.G. Gu, Huazhong University of Science and Technology, China H. Jiang, Huazhong University of Science and Technology, China S.Y. Liu, Huazhong University of Science and Technology, China |
| Correspondent: | Click to Email |
The attitude angles are important parameters describing the motion of the object. In the fields of precision manufacturing, robotics control, navigation of the aircraft, the accurate and real-time measurements of the attitude angles (yaw angle, pitch angle and roll angle) are very important. Due the advantages of non-contact, low cost, non-destructive and high precision, the optical methods have been popular used for measuring the attitude of the object.
In our work, we present a novel optical monitor for the attitude tracking. The proposed method utilizes the principle that polarized light incident in different directions into the birefringent crystals can produce different phase modulations. Then, the attitude angle of the object attached with a birefringent crystal can be obtained by measuring the phase change. The optical monitor is based on the division-of-amplitude polarimetry with a time resolution of several nanoseconds, which is capable of monitoring the changes in all the attitude angles simultaneously. In order to verify the correctness and the performance of the optical monitor, we performed real-time measurement experiments on the attitude angles of a zero-order quarter-wave plate and a multi-order half-wave plate. The roll angle is continuously changed within the range of 0 ~ 360°, while the pitch angle and yaw angle are varied within ±7° and ±40° respectively. The results show that not only the attitude angles, but also the angular velocities and the accelerations of the roll angle, can be extracted, and the errors of all attitude angles is less than 0.5°.