| AVS 66th International Symposium & Exhibition | |
| Spectroscopic Ellipsometry Focus Topic | Wednesday Sessions |
| Session EL+EM-WeA |
| Session: | Spectroscopic Ellipsometry: Novel Applications and Theoretical Approaches |
| Presenter: | Jiamin Liu, Huazhong University of Science and Technology, China |
| Authors: | J. Liu, Huazhong University of Science and Technology, China H. Jiang, Huazhong University of Science and Technology, China S.Y. Liu, Huazhong University of Science and Technology, China |
| Correspondent: | Click to Email |
Noble metals have been widely used in thermo-plasmonics field, such as thermo- photovoltaics, heat-assisted magnetic recording and photothermal therapy, thus studying the temperature-dependent optical constants of these metals are crucial for both understanding the temperature effects on optical properties and providing essential data for the plasmonic simulations.
In this work, a high temperature spectroscopic ellipsometry covering the spectral range of 200-1000nm has been built, which is able to measure the ellipsometric parameters of samples when temperature is varying from 300K to 1200K. The noble metallic samples are heated at a mixing atmosphere of 5% H2 and 95% Ar to avoid the possible thermal oxidation. An oscillator- parametrization regression method based on the Drude-dual-TaucLorentz-Lorentz model and the B-spline model has been proposed to determine the optical constants and the roughness of the heated noble metals. Both the optical constants and the electronics parameters of noble metals heated below 900K have a temperature-dependency similar to the recently reported results. Taking the gold film as an example, the DC resistivity is increasing from 2.273×10-6 to 2.414×10-6Ω·cm with the temperature increasing from 300K to 800K, while the electron relaxation time is decreasing from 20.787 to 9.021fs. Additionally, it has been noticed the first absorption peak near 2.7eV first increases and then decreases, while the second absorption peak near 3.7eV shows the opposite characteristics with the temperature increasing from 300K to 800K. Besides, the optical constants of Au film heated above 900K has some similarities to that of SnTe, which might be caused by the combined effect from the possible formation of Au-Si binary phase and the possible transition of vertical columnar grains to granular grains.